Parylene's Resistance to Chemicals
(Acids, Alkalis and Solvents)
Swelling (Thickness change, %) on immersion in various chemicals for 10-16μm thickness film. (Typical values only)
| Chemicals | Immersing Condition | Parylene C | Parylene N | Typical Values | |||
|---|---|---|---|---|---|---|---|
| Epoxies | Urethanes | ||||||
| Hydrochloric acid 10% | 75 / 120min | A | -0.28 | A | +0.08 | B~C | C~D |
| Sulfuric acid 10% | 75 / 120 min | A | -0.28 | A | +0.07 | A~B | C~D |
| Nitric acid 10% | 75 / 120min | A | -0.28 | A | +0.15 | D | D |
| Hydrofluoric acid 10% | 50 / 120min | A | +0.09 | A | +0.37 | B | D |
| NaOH solution 10% | 75 / 120min | A | -0.28 | A | +0.15 | A~B | B~C |
| NH4OH solution 10% | 75 / 120min | A | -0.38 | A | +0.15 | A | B~C |
| Hydrogen peroxide water (H2O2) | 50 / 120min | A | 0.00 | A | 0.00 | C~D | C~D |
| n-Octane | 75 / 120min | A | +0.28 | A | +0.29 | C | B |
| Toluene | 75 / 120min | A | +1.32 | A | +0.30 | C | C |
| Monochlorobenzene | 75 / 120min | A | +1.04 | A | +0.37 | D | |
| Pyridine | 75 / 120min | A | +0.28 | A | +0.29 | D | C |
| 2-Propanol (IPA) | 50 / 120min | A | 0.00 | A | +0.07 | C | B |
| Acetone | 50 / 120min | A | -0.09 | A | +0.15 | C~D | C |
A- Excellent Resistance B- Good Resistance C- Possible to Use with Difficult
Technical Data Sheet: PCT Parylene Chemical Resistance
